The entire technology of printing high resolution and high-density integrated circuits patterns into thin resist process pattern transfer coatings is given a close look here. Includes optical lithography, electron-beam, ion beam and X-ray lithography and coverage of various lithography methods. Read More
The entire technology of printing high resolution and high-density integrated circuits patterns into thin resist process pattern transfer coatings is given a close look here. Includes optical lithography, electron-beam, ion beam and X-ray lithography and coverage of various lithography methods. Read Less
Add this copy of Handbook of Vlsi Microlithography to cart. $156.74, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 2002 by William Andrew.
Add this copy of Handbook of Vlsi Microlithography to cart. $211.35, new condition, Sold by Just one more Chapter rated 4.0 out of 5 stars, ships from Miramar, FL, UNITED STATES, published 2002 by William Andrew.
