This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field.
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This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field.
Read Less