This comprehensive reference on materials, properties, and specific processes for MEMS fabrication includes a "Material Selection Guide" and a "Material Database". The "Processes" section catalogs microfabrication processes, with examples of common uses.
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This comprehensive reference on materials, properties, and specific processes for MEMS fabrication includes a "Material Selection Guide" and a "Material Database". The "Processes" section catalogs microfabrication processes, with examples of common uses.
Read Less
Add this copy of Mems Materials and Processes Handbook: 1 (Mems to cart. $202.98, new condition, Sold by ASHFORD BOOK STORE rated 5.0 out of 5 stars, ships from Weybridge, SURREY, UNITED KINGDOM, published 2011 by Springer.
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