This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography. Read More
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography. Read Less
Add this copy of Modelling of Microfabrication Systems to cart. $118.70, new condition, Sold by Educational Media Centre rated 4.0 out of 5 stars, ships from New Delhi, DELHI, INDIA, published 2010 by Springer-Verlag Berlin and Heidelberg GmbH & Co. K.
Edition:
2010, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
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2010, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
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2010, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
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2010, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
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2003, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
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2003, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
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2003, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
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Edition:
2003, Springer-Verlag Berlin and Heidelberg GmbH & Co. K