"This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get a primer on the outlook of optical lithography and the many next ...
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"This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get a primer on the outlook of optical lithography and the many next-generation technologies that may greatly enhance semiconductor manufacturing in the near future. This second edition has brand new material on proximity printing, as well as updated and expanded material on: exposure systems, image formation, E-D methodology, hardware components, processing and optimization, and EUV and immersion lithographies"--
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Add this copy of Optical Lithography to cart. $100.23, new condition, Sold by Books2anywhere rated 5.0 out of 5 stars, ships from Fairford, GLOUCESTERSHIRE, UNITED KINGDOM, published 2021 by John Wiley & Sons.
Edition:
2021, SPIE-International Society for Optical Engineering
Publisher:
SPIE-International Society for Optical Engineering
Published:
11/30/2021 12: 00: 00 AM
Language:
English
Alibris ID:
18940532785
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PLEASE NOTE, WE DO NOT SHIP TO DENMARK. New Book. Shipped from UK in 4 to 14 days. Established seller since 2000. Please note we cannot offer an expedited shipping service from the UK.
Add this copy of Optical Lithography: Here Is Why to cart. $124.66, like new condition, Sold by GreatBookPrices rated 4.0 out of 5 stars, ships from Columbia, MD, UNITED STATES, published 2021 by SPIE-International Society for Optical Engineering.
Edition:
2021, SPIE-International Society for Optical Engineering
Publisher:
SPIE-International Society for Optical Engineering
Published:
2021
Language:
English
Alibris ID:
18949140601
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Fine. Contains: Illustrations. In Stock. 100% Money Back Guarantee. Brand New, Perfect Condition, allow 4-14 business days for standard shipping. To Alaska, Hawaii, U.S. protectorate, P.O. box, and APO/FPO addresses allow 4-28 business days for Standard shipping. No expedited shipping. All orders placed with expedited shipping will be cancelled. Over 3, 000, 000 happy customers.
Add this copy of Optical Lithography: Here is Why, Second Edition to cart. $124.67, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 2021 by SPIE--The International Societ.
Edition:
2021, SPIE-International Society for Optical Engineering
Add this copy of Optical Lithography: Here Is Why to cart. $132.17, new condition, Sold by Booksplease rated 4.0 out of 5 stars, ships from Southport, MERSEYSIDE, UNITED KINGDOM, published 2021 by SPIE-International Society for Optical Engineering.
Edition:
2021, SPIE-International Society for Optical Engineering
Add this copy of Optical Lithography: Here Is Why to cart. $132.72, new condition, Sold by GreatBookPricesUK5 rated 5.0 out of 5 stars, ships from Castle Donington, DERBYSHIRE, UNITED KINGDOM, published 2021 by SPIE-International Society for Optical Engineering.
Edition:
2021, SPIE-International Society for Optical Engineering
Publisher:
SPIE-International Society for Optical Engineering
Published:
2021
Language:
English
Alibris ID:
18949538335
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Add this copy of Optical Lithography: Here Is Why to cart. $135.88, like new condition, Sold by GreatBookPricesUK5 rated 5.0 out of 5 stars, ships from Castle Donington, DERBYSHIRE, UNITED KINGDOM, published 2021 by SPIE-International Society for Optical Engineering.
Edition:
2021, SPIE-International Society for Optical Engineering
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SPIE-International Society for Optical Engineering
Published:
2021
Language:
English
Alibris ID:
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Fine. Contains: Illustrations. In Stock. 100% Money Back Guarantee. Brand New, Perfect Condition, allow 4-14 business days for standard shipping. To Alaska, Hawaii, U.S. protectorate, P.O. box, and APO/FPO addresses allow 4-28 business days for Standard shipping. No expedited shipping. All orders placed with expedited shipping will be cancelled. Over 3, 000, 000 happy customers.
Add this copy of Optical Lithography: Here Is Why to cart. $149.16, new condition, Sold by GreatBookPrices rated 4.0 out of 5 stars, ships from Columbia, MD, UNITED STATES, published 2021 by SPIE-International Society for Optical Engineering.
Edition:
2021, SPIE-International Society for Optical Engineering
Publisher:
SPIE-International Society for Optical Engineering
Published:
2021
Language:
English
Alibris ID:
18948898004
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New. Contains: Illustrations. In Stock. 100% Money Back Guarantee. Brand New, Perfect Condition, allow 4-14 business days for standard shipping. To Alaska, Hawaii, U.S. protectorate, P.O. box, and APO/FPO addresses allow 4-28 business days for Standard shipping. No expedited shipping. All orders placed with expedited shipping will be cancelled. Over 3, 000, 000 happy customers.
