Microlithography Fundamentals...
Saburo Nonogaki,
Ueno Takumi
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Microlithography: Science and...
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Fundamental Principles of...
Chris Mack
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Materials and Processes for...
Alex Robinson (Volume editor),
Richard Lawson (Volume editor)
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Photomask Fabrication...
Benjamin G Eynon,
Banqiu Wu
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Scanning Probe Lithography
Hyongsok T. Soh,
Kathryn Wilder Guarini
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