Principles of Plasma...
Michael A Lieberman,
Alan J Lichtenberg
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Handbook of Plasma Processing...
Stephen M Rossnagel,
William D Westwood
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Plasma Etching Processes for...
Nicolas Posseme (Editor)
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Handbook of Advanced Plasma...
R J Shul (Editor),
S J Pearton (Editor)
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Micromachining Using...
Rolf Wuthrich,
Jana D Abou Ziki
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Niederdruckplasmen Und...
Gerhard Franz
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