Plasma Etching: Fundamentals...
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Principles of Plasma...
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Glow Discharge Processes:...
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Handbook of Plasma Processing...
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Introduction to...
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Dry Etching for VLSI
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Handbook of Advanced Plasma...
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Micromachining Using...
Rolf Wuthrich,
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Photon, Beam, and Plasma...
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Plasma Deposition, Treatment,...
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Plasma Etching: An...
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Applications of Plasma...
Takuo Sugano (Editor)
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